发明名称 CHIP SCALE MARKER AND MARKING METHOD
摘要 Provided is a chip scale marker and a marking method. The method for marking, using a chip scale marker, wherein a laser beam is irradiated from a laser source on the wafer chips via a galvano scanner and an f-theta lens, the method comprising: (a) measuring position information of a plurality of points on the wafer; (b) transmitting the measured position information to a controller; (c) calculating a deviation between a marking distance between the f-theta lens and the point on the wafer surface and a focus distance of the f-theta lens from the transmitted position information; and (d) if the deviation is greater than a predetermined value in the step (c), calibrating the wafer chip to be positioned at the focus distance of the f-theta lens. According to the chip scale marker, it is possible to increase marking quality by measuring and calibrating a vertical distance from an f-theta lens of the laser system to each wafer chip so that the wafer chip is marked at a predetermined distance from the f-theta lens of the laser system. <IMAGE>
申请公布号 SG106120(A1) 申请公布日期 2004.09.30
申请号 SG20030000167 申请日期 2003.01.24
申请人 EO TECHNICS CO., LTD. 发明人 YOU-HIE HAN
分类号 G01B11/00;G01B21/00;H01L21/00;H01L21/02;H01L21/68;H01L23/544;(IPC1-7):B23K26/20 主分类号 G01B11/00
代理机构 代理人
主权项
地址