摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device manufacturing method which thins a board of a piezoelectric substance more with high precision, and facilitates an increase in the frequency of a quartz resonator. SOLUTION: The quartz resonator excites a desired frequency in a thickness slide vibration mode and uses a rectangular quartz diaphragm in which a vibration region having stimulating electrodes on both front and rear major surfaces, and a reinforcing section thicker than the thickness of the vibration region are integrally formed around the vibration region. In the quartz resonator, the reinforcing section has a through hole(s) penetrating both front and rear major surfaces of the quartz diaphragm at at least one site of the reinforcing section, and a leading-out electrode(s) is(are) arranged in the hole(s) to solve the problem. COPYRIGHT: (C)2004,JPO&NCIPI
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