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发明名称
SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
摘要
申请公布号
EP1017873(A4)
申请公布日期
2004.08.25
申请号
EP19980933329
申请日期
1998.07.10
申请人
SILICON VALLEY GROUP THERMAL SYSTEMS LLC
发明人
MILLER, ADAM, Q.;DOBKIN, DANIEL, M.
分类号
C03C17/00;C23C16/44;C23C16/455;H01L21/205;H01L21/3065;H01L21/31;(IPC1-7):C23C16/00;C03B19/14
主分类号
C03C17/00
代理机构
代理人
主权项
地址
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