发明名称 Method and apparatus of producing thin film of metal or metal compound
摘要 A thin film of metal or metal compound is produced by preparing an ultrafine particle dispersion liquid by dispersing ultrafine particles at least partly made of metal into a given organic solvent, applying the ultrafine particle dispersion liquid to a substrate, drying the ultrafine particle dispersion liquid to leave metal or metal compound particles on the substrate, heating the metal or metal compound particles to join the metal or metal compound particles, and annealing the metal or metal compound particles into a thin film.
申请公布号 US6780245(B2) 申请公布日期 2004.08.24
申请号 US20020315170 申请日期 2002.12.10
申请人 EBARA CORPORATION 发明人 HORIE KUNIAKI;FUKUNAGA AKIRA
分类号 C23C18/02;C23C8/02;C23C24/08;C23C24/10;H01L21/20;H01L21/288;(IPC1-7):B05C11/08 主分类号 C23C18/02
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