| 摘要 |
PURPOSE: An apparatus is provided to achieve improved work efficiency by permitting the processes of evaporation material preparation, component replacement, and system maintenance to be performed in the outside of a glove box. CONSTITUTION: An apparatus comprises a glove box(110) filled with a gas; one or more vacuum chambers(120a,120b) including first vacuum chambers(121a,121b) disposed in the glove box, and second vacuum chambers(122a,122b) communicated to the first vacuum chambers and disposed in the outside of the glove box; a vacuum evacuation unit for vacuum evacuation of the vacuum chambers; and evaporation sources(123a,123b) arranged in the vacuum chambers, and which sublimes and/or evaporates the material to be deposited on a substrate by heating the material.
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