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发明名称
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON EXTREM-ULTRAVIOLETTLICHT FÜR DIE VERWENDUNG IN DER FOTOLITOGRAPHIE
摘要
申请公布号
DE69729588(D1)
申请公布日期
2004.07.22
申请号
DE1997629588
申请日期
1997.12.23
申请人
ADVANCED ENERGY SYSTEMS, INC.
发明人
GUTOWSKI, M.;CALIA, S.;TODD, M.
分类号
G21G4/00;G03F7/20;G21K5/00;H01L21/027;H01S3/03;H01S3/22;H05G2/00;(IPC1-7):G21G4/00;G21G5/00;G01J1/00
主分类号
G21G4/00
代理机构
代理人
主权项
地址
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