Method and apparatus for measurements of patterned structures,申请号EP19990105405-传众专利搜索

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发明名称	Method and apparatus for measurements of patterned structures
摘要
申请公布号	EP1037012(B1)	申请公布日期	2004.07.14
申请号	EP19990105405	申请日期	1999.03.16
申请人	NOVA MEASURING INSTRUMENTS LIMITED	发明人	SCHEINER, DAVID;FINAROV, MOSHE
分类号	G01B11/02;G01B11/06;(IPC1-7):G01B11/06;G01B11/04	主分类号	G01B11/02
代理机构		代理人
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