| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device which can realize the accurate positioning of a substance on the basis of low cost and space saving. SOLUTION: In step 403, alignment is conducted to realize measurement of coordinates of wafer with excellent accuracy. In step 404, measurement of time is started from execution of alignment with a timer. Next, when observation has been completed at all observation points in step 405, the wafer is unloaded to complete the observation with the wafer transfer system in step 410. If the observation points still exist, the process goes to step 406. In step 408, the passage of time from the end of alignment is calculated by reading the timer in the step 408. If the predetermined time registered in a control device has passed (time until re-alignment), the process returns to the step 403 to execute the alignment again. COPYRIGHT: (C)2004,JPO&NCIPI |
