发明名称 METHOD OF PRODUCING RESIN MOLDED PRODUCT
摘要 <p>A resin molded product according to this invention is produced as follows. Firstly, a resist pattern formation step is performed to form a resist pattern. In this step, (a) formation of the first resist layer on a substrate (b) exposure of the first resist layer using a mask (c) formation of the second resist layer (d) mask positioning (e) exposure of the second resist layer are performed, and the steps (c) to (e) are repeated a plurality of times until a desired thickness of the resist layer is obtained. Then, development is performed to form a desired resist pattern. Secondly, a metal structure formation step is performed to deposit a metal structure in accordance with the resist pattern by plating. Finally, a molded product formation step is performed to form a resin molded product by using the metal structure as a mold. An accurate and low-cost resin molded product and a production process therefor are thereby provided. <IMAGE></p>
申请公布号 EP1431018(A1) 申请公布日期 2004.06.23
申请号 EP20020777795 申请日期 2002.09.26
申请人 KURARAY CO., LTD. 发明人 NISHI, TAIJI;YANAGAWA, YUKIHIRO;KAWAHARA, SHIGERU
分类号 B29C33/38;G03F7/00;B29C33/40;B29C33/42;B81C1/00;G03F7/095;G03F7/20;(IPC1-7):B29C33/38 主分类号 B29C33/38
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