发明名称 Assembly apparatus and method of contactor
摘要 An assembly apparatus of a contactor including unit contactors and a base substrate. The apparatus includes a laying mechanism for laying a substrate for alignment, a first conveying mechanism for conveying a plurality of unit contactors to the substrate for alignment laid on the laying mechanism, a second conveying mechanism for conveying a base substrate, a holding mechanism for holding the base substrate, and a positioning mechanism for positioning the substrate for alignment with the plurality of unit contactors disposed thereon and the base substrate. Also included is a contact mechanism for bringing the plurality of unit contactors disposed on the substrate for alignment into contact with the base substrate, and a heating mechanism for heating at least one of the substrate for alignment and base substrate to electrically connect the plurality of unit contactors disposed on the substrate for alignment to the base substrate.
申请公布号 US6747467(B2) 申请公布日期 2004.06.08
申请号 US20010985358 申请日期 2001.11.02
申请人 TOKYO ELECTRON LIMITED 发明人 IINO SHINJI
分类号 G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R1/06
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