| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive filter type mold to obtain a ceramic formed body without density nonuniformity and composition nonuniformity and with a different coating thickness, and a method for manufacturing a sputtering target sintered body and an ITO sintered body having a different coating thickness. <P>SOLUTION: In the filter type mold formed of a non-water solubility material to obtain a formed material by vacuum-dewatering the water content from a ceramic raw material slurry, the filter type mold comprises a lower mold having a water drainage hole of one or more, a filter with water permeability mounted on the lower mold, and a mold frame to sandwich the filter from the upper face side through a sealing material to seal the filter. The water content in the slurry is vacuum-dewatered from the only filter face side. The filter face side of the lower mold has an irregular shape. The slurry including a ceramic raw material powder, or an indium oxide powder and a tin oxide powder; ion-exchanged water; and an organic additive is prepared and injected into the mold. The obtained molding is dried and then sintered. <P>COPYRIGHT: (C)2004,JPO |
