发明名称 Interconnect for microelectronic structures with enhanced spring characteristics
摘要 An interconnection element and a method of forming an interconnection element. In one embodiment, the interconnection element includes a first structure and a second structure coupled to the first structure. The second structure coupled with the first material has a spring constant greater than the spring constant of the first structure alone. In one embodiment, the interconnection element is adapted to be coupled to an electronic component tracked as a conductive path from the electronic component. In one embodiment, the method includes forming a first (interconnection) structure coupled to a substrate to define a shape suitable as an interconnection in an integrated circuit environment and then coupling, such as by coating, a second (interconnection) structure to the first (interconnection) structure to form an interconnection element. Collectively, the first (interconnection) structure and the second (interconnection) structure have a spring constant greater than a spring constant of the first (interconnection) structure.
申请公布号 US2004102064(A1) 申请公布日期 2004.05.27
申请号 US20030715683 申请日期 2003.11.17
申请人 FORMFACTOR, INC. 发明人 MATHIEU GAETAN L.
分类号 H01L21/48;H01L23/48;H01L23/485;H01R12/00;H01R13/24;(IPC1-7):H01R12/00 主分类号 H01L21/48
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