| 摘要 |
PROBLEM TO BE SOLVED: To relax the allowable tolerance in manufacturing micro mirrors, to increase the yield and to reduce the cost. SOLUTION: In an optical switch, the optical path of an incident light beam is switched by forming a micro mirror 41 in an upright form on a movable electrode plate 11 arranged opposite to a fixed electrode plate 15, and the micro mirror 41 is moved by electrostatically driving the movable electrode plate 11 in the direction perpendicular to the plate face. The micro mirror 41 is provided with two reflection faces 42 and 43 which emit the incident light beam in an emitting direction which has a predetermined angle with respect to the incident direction by reflecting the incident light beam twice. Even when the micro mirror is manufactured by being rotated from a normal angular position, only a slight offset is generated because the direction of the emitted light beam does not deviate as much as twice the angle, which situation happens in a conventional rectangular solid type micro mirror. COPYRIGHT: (C)2004,JPO |
