发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials. In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member.
申请公布号 AU2003275615(A1) 申请公布日期 2004.05.25
申请号 AU20030275615 申请日期 2003.10.23
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 TORU TAKAYAMA;JUNYA MARUYAMA;YUMIKO OHNO;MASAKAZU MURAKAMI;TOSHIJI HAMATANI;HIDEAKI KUWABARA;SHUNPEI YAMAZAKI
分类号 H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L27/146;H01L29/786;H01L31/105 主分类号 H01L21/336
代理机构 代理人
主权项
地址