发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials. In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member. |
申请公布号 |
AU2003275615(A1) |
申请公布日期 |
2004.05.25 |
申请号 |
AU20030275615 |
申请日期 |
2003.10.23 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
TORU TAKAYAMA;JUNYA MARUYAMA;YUMIKO OHNO;MASAKAZU MURAKAMI;TOSHIJI HAMATANI;HIDEAKI KUWABARA;SHUNPEI YAMAZAKI |
分类号 |
H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L27/146;H01L29/786;H01L31/105 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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