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发明名称
Abrichtgerät für chemisch-mechanisches Polierkissen
摘要
申请公布号
DE69823100(D1)
申请公布日期
2004.05.19
申请号
DE19986023100
申请日期
1998.06.02
申请人
INFINEON TECHNOLOGIES AG
发明人
PLOESSL, ROBERT
分类号
B24B37/04;B24B53/00;B24B55/06;(IPC1-7):B24B37/04
主分类号
B24B37/04
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