发明名称 Covered photomask holder and method of using the same
摘要 A covered photomask holder and a method of using the covered photomask holder are disclosed. A photomask holder includes a gripping mechanism to engage and retain a component with the photomask holder. A handle is coupled to the gripping mechanism that manipulates the gripping mechanism. A protective cover is associated with the gripping mechanism that encloses the component while engaged within the photomask holder.
申请公布号 US6736386(B1) 申请公布日期 2004.05.18
申请号 US20020116431 申请日期 2002.04.04
申请人 DUPONT PHOTOMASKS, INC. 发明人 PARKER JEFFREY B.
分类号 B25B5/16;G03F1/14;G03F7/20;H01L21/687;(IPC1-7):B25B5/16 主分类号 B25B5/16
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