发明名称 |
Covered photomask holder and method of using the same |
摘要 |
A covered photomask holder and a method of using the covered photomask holder are disclosed. A photomask holder includes a gripping mechanism to engage and retain a component with the photomask holder. A handle is coupled to the gripping mechanism that manipulates the gripping mechanism. A protective cover is associated with the gripping mechanism that encloses the component while engaged within the photomask holder.
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申请公布号 |
US6736386(B1) |
申请公布日期 |
2004.05.18 |
申请号 |
US20020116431 |
申请日期 |
2002.04.04 |
申请人 |
DUPONT PHOTOMASKS, INC. |
发明人 |
PARKER JEFFREY B. |
分类号 |
B25B5/16;G03F1/14;G03F7/20;H01L21/687;(IPC1-7):B25B5/16 |
主分类号 |
B25B5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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