发明名称 POSITIONING DEVICE, ALIGNER APPLYING SAME, AND METHOD OF MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a positioning device whose adjustment of assembly and maintenance are facilitated by canceling out cogging caused in a motor. SOLUTION: This positioning device of a moving body positions the moving body by controlling a driving source for driving the moving body based on the positional information. This device comprises a cogging correction unit (210) which outputs a correction command for generating retentivity in the driving source based on the positional information of the moving body so as to cancel out cogging caused in the driving source, a mode switching control unit (250) for generating the mode control information which selectively switches control modes of the driving source, and a first mode switching unit (220) for outputting the correction command outputted by the cogging correction unit (210) based on the mode control information as the first control information to the driving source. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004140182(A) 申请公布日期 2004.05.13
申请号 JP20020303454 申请日期 2002.10.17
申请人 CANON INC 发明人 SATO MIKIO
分类号 G03F9/00;H01L21/027;H01L21/68;(IPC1-7):H01L21/027 主分类号 G03F9/00
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