| 摘要 |
PROBLEM TO BE SOLVED: To provide a generation method of an evaluation sequence for quickly performing various kinds of measurements and evaluation while controlling an evaluation target, such as a lens to be inspected, and efficiently and accurately generating an evaluation sequence for evaluating the evaluation target, and to provide a generation program and an evaluation system. SOLUTION: A control command input cell 114a, where a control bit string for controlling the evaluation target is associated in advance and a control command is inputted, is displayed. An evaluation standard input cell 182a, where evaluation items for evaluating measurement results and standard names are inputted, is displayed. At each sequence step of the evaluation sequence, the control command inputted to the control command input cell 114a and the standard names inputted to the evaluation standard input cell 182a are selected. In each sequence step, the evaluation target is controlled for measurement by the control bit train corresponding to the selected control command, and an evaluation sequence for evaluating the measurement result by evaluation items corresponding to the selected standard name is executed or generated. COPYRIGHT: (C)2004,JPO
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