RESIST STRIPPER FOR MANUFACTURING FLAT PANEL DISPLAY AND METHOD FOR FORMING ALUMINUM ELECTRODE FOR FLAT PANEL DISPLAY USING SAME

摘要

PROBLEM TO BE SOLVED: To facilitate treatment of a resist stripper in formation of aluminum electrodes for a flat panel display. SOLUTION: The resist stripper for manufacturing the flat panel display is composed to contain a chelating agent and a water-soluble antioxidant. The chelating agent contains at least either of pyrogallol and catechol. An alkaline soluble mask is stripped by using the resist stripper from the substrate which is formed with the alkaline soluble mask and is then formed with an aluminum film. At this time, the elution of the aluminum to the resist stripper is suppressed to a lower level by the chelating agent. COPYRIGHT: (C)2004,JPO