| 摘要 |
A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host processor associated with the processing tool. The processor compares the first and second job files, wherein the processor determines whether the first and second job files differ. A semiconductor manufacturing method is also provided. A first job file including a master job file for a processing tool is received through a network. A second job file is also received through the network from a host processor associate with the processing tool The job files are then compared to determine whether the first and second job files differ.
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