Interferometer system of compact configuration

摘要

An expanding measuring beam is inserted into a cavity of a frequency-scanning interferometer. The expanding measuring beam encounters non-specular (diffuse) reference and object surfaces so that the reflected light can be imaged with an imaging system of reduced dimension. The compact interferometer is adaptable to a variety of applications. For example, the compact interferometer can be incorporated into a sensor of a multi-stage measuring instrument or into a handheld imager.