发明名称 Compensation component and method for fabricating the component
摘要 A compensation component, in which a lateral section and, at least at one end of the lateral section, a section that is inclined with respect to the surface of a drift path, includes n-conducting and p-conducting regions completely embedded in a semiconductor body without a trench. In such a case, the inclined section is formed by ion implantation through an implantation mask with an inclined edge.
申请公布号 US2004067625(A1) 申请公布日期 2004.04.08
申请号 US20030675758 申请日期 2003.09.30
申请人 PFIRSCH FRANK 发明人 PFIRSCH FRANK
分类号 H01L29/06;H01L29/78;(IPC1-7):H01L21/425 主分类号 H01L29/06
代理机构 代理人
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