发明名称 Method and apparatus for inspecting the surface of substrates
摘要 In a substrate inspecting apparatus comprising a projecting section (4) in which light sources (8), (9) and (10) for emitting colored lights of R, G and B are provided in directions having different elevation angles, one or two color components which is/are greater than the mean value of the intensities of color components of red, green and blue is/are extracted for an inspecting region including a soldered portion. Inclined surfaces adapted to the light sources (8), (9) and (10) are converted into monochromatic shaded images of red, green and blue by the extraction processing, respectively. Furthermore, a boundary position between the inclined surfaces adapted to the light sources (8) and (9) are converted into shaded images having a mixed color of red and green and the boundary position between the inclined surfaces adapted to the light sources (9) and (10) is converted into a shaded image having a mixed color of green and blue.
申请公布号 EP1333275(A3) 申请公布日期 2004.04.07
申请号 EP20020028989 申请日期 2002.12.27
申请人 OMRON CORPORATION 发明人 FUJII, YOSHIKI;MURAKAMI, KIYOSHI
分类号 G01B11/24;G01J3/08;G01J3/46;G01N21/88;G01N21/956 主分类号 G01B11/24
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