| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance inkjet head capable of forming a good image in which unevenness of density is suppressed, and to provide an inkjet printer employing it. SOLUTION: The inkjet head comprises a head substrate 1 where an insulating layer 2a principally comprising silicon oxide is formed on the upper surface of a base plate 2 composed of single crystal silicon and a plurality of heating resistors 4 are arranged on the insulating layer 2a, and a top plate 7 arranged to form a specified gap between the head substrate 1 and the top plate 7 wherein the gap is filled with ink 10. Between the heating resistors 4 and the insulating layer 2a, an anti-oxidation layer 3 principally comprising silicon nitride is interposed over the region arranged with the heating resistors 4, and a recess 3a is made in the anti-oxidation layer 3 in the region between adjacent heating resistors 4 in order to expose the insulating layer 2a from the bottom face of the recess 3a. COPYRIGHT: (C)2004,JPO
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