| 发明名称 |
Controlling micro-electro-mechanical cavities |
| 摘要 |
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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| 申请公布号 |
US6710908(B2) |
申请公布日期 |
2004.03.23 |
| 申请号 |
US20020076224 |
申请日期 |
2002.02.13 |
| 申请人 |
IRIDIGM DISPLAY CORPORATION |
发明人 |
MILES MARK W.;CHUI CLARENCE |
| 分类号 |
G01J3/26;G02B6/12;G02B26/00;G02B26/02;G02B26/08;G02F1/137;G02F1/21;(IPC1-7):G02B26/00 |
主分类号 |
G01J3/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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