发明名称 |
Method and apparatus for measuring a pitch |
摘要 |
<p>An optical disk 11 (sample) is laid on a sample moving unit 21 within a vacuum chamber 20. An electron beam radiating mechanism 30 radiates an electron beam to the optical disk 11 while moving the optical disk 11 at a constant speed. Electron detecting means 27 detects an electron from the optical disk 11. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk 11. Also, the electron beam radiating mechanism 30 is provided with a fast deflector 33 for averaging within a deflection area to measure the track pitch. <IMAGE></p> |
申请公布号 |
EP1398774(A2) |
申请公布日期 |
2004.03.17 |
申请号 |
EP20030255610 |
申请日期 |
2003.09.09 |
申请人 |
PIONEER CORPORATION |
发明人 |
KOJIMA, YOSHIAKI;KASONO, OSAMU |
分类号 |
G01B15/00;G01B15/08;G11B7/085;G11B7/26;(IPC1-7):G11B7/007 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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