Integrated analysis rig has high frequency pulsed laser excitation with antenna coupling to induced currents and synchronous detection in analysis unit

摘要

An integrated circuit (C) analysis rig (10) has a high frequency pulsed infrared or optical laser (20) excitation unit (14) to induce a current and current analysis subsystem (16) with one or more electric or magnetic field loop, rod or solenoid antennas (30) with maximum intensity either along the laser axis or mutually inclined and connected to a signal processing unit (50, 52, 54) synchronized to the excitation. Can be used with a spectrum analyzer in place of the synchronous detector.