| 摘要 |
In an infrared detector array according to the present invention, on a thin film with a periphery portion supported by a frame, three or more infrared detecting pixels are arranged in an array pattern so that the hot junctions of thermocouples are arranged above a concave portion and the cold junctions thereof are arranged above the frame. Compensation means is provided which compensates for a difference between the detection sensitivity of the infrared detecting pixel arranged in a peripheral end portion and the detection sensitivity of the infrared detecting pixel arranged in an intermediate portion based on a correlation between electromotive force extracted when the infrared detecting pixel is illuminated with infrared radiation and its position. Owing to this configuration, a plurality of infrared detecting pixels can be integrated and the sensitivity thereof can be made sufficiently high and uniform. |
