APPARATUS WITH COAXIAL BARREL OF FOCUSED-ION BEAM AND SCANNING ELECTRON MICROSCOPE, AND METHOD FOR IMAGE FORMING AND PROCESSING

摘要

PROBLEM TO BE SOLVED: To install a micromachining function of an FIB (focused-ion beam) system and a non-destructive and excellent image forming function of an SEM (scanning electron microscope) into a single apparatus suitable for mass production of high-precision nanodevices. SOLUTION: An apparatus with a coaxial barrel of an FBI beam and an SEM includes a coaxial FIB and an electron beam allowing accurate processing by the FIB using an image formed by the electron beam. In an embodiment, a deflection means deflects secondary particles collected via a final lens toward a detector as well as deflects the electron beam on an axis of the FBI beam. In another embodiment, simultaneous or alternative operations of the FIB and the SEM can be achieved by a positively biased electrostatic final lens with focusing of both beams by using the same voltages. In other embodiments, a collision energy of electrons can be varied without varying a working distance. COPYRIGHT: (C)2004,JPO