发明名称 Method for providing nano-structures of uniform length
摘要 This invention relates to the field of nanotechnology. Specifically the invention describes a method for cutting a multiplicity of nano-structures to uniform dimensions of length, length and width, or area, or to a specific distribution of lengths or area using various cutting techniques.
申请公布号 US2004038556(A1) 申请公布日期 2004.02.26
申请号 US20030406725 申请日期 2003.04.03
申请人 FRENCH ROGER HARQUAIL;GIERKE TIMOTHY;HARMER MARK ANDREW;JAGOTA ANAND;LUSTIG STEVEN RAYMOND;MEHTA RAKESH H.;HIETPAS PAULA BEYER;ONOA BIBIANA 发明人 FRENCH ROGER HARQUAIL;GIERKE TIMOTHY;HARMER MARK ANDREW;JAGOTA ANAND;LUSTIG STEVEN RAYMOND;MEHTA RAKESH H.;HIETPAS PAULA BEYER;ONOA BIBIANA
分类号 B82B3/00;B82B1/00;C01B31/02;(IPC1-7):H01L21/00 主分类号 B82B3/00
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