FLUORINATED POLYMERS HAVING POLYCYCLIC GROUPS WITH FUSED 4-MEMBERED CARBOCYCLIC RINGS, USEFUL AS PHOTORESISTS, AND PROCESSES FOR MICROLITHOGRAPHY,申请号AU20030259727-传众专利搜索

发明名称	FLUORINATED POLYMERS HAVING POLYCYCLIC GROUPS WITH FUSED 4-MEMBERED CARBOCYCLIC RINGS, USEFUL AS PHOTORESISTS, AND PROCESSES FOR MICROLITHOGRAPHY
摘要
申请公布号	AU2003259727(A1)	申请公布日期	2004.02.25
申请号	AU20030259727	申请日期	2003.08.08
申请人	E. I. DU PONT DE NEMOURS AND COMPANY	发明人	ANDREW, E. FEIRING;FRANK, L., III SCHADT;VIACHESLAV ALEXANDROVICH PETROV;BRUCE, EDMUND SMART;WILLIAM, BROWN FARNHAM
分类号	C08F8/00;C08F214/18;C08F214/26;C08F216/12;C08F220/24;C08F232/00;C08F232/08;G03C1/492;G03F7/004;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):C08F14/18;G03C1/73	主分类号	C08F8/00
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