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发明名称
OZONE PROCESSING APPARATUS
摘要
申请公布号
AU2003254785(A1)
申请公布日期
2004.02.23
申请号
AU20030254785
申请日期
2003.07.30
申请人
SUMITOMO PRECISION PRODUCTS CO., LTD.
发明人
TATSUO KIKUCHI;TAKEO YAMANAKA;YUKITAKA YAMAGUCHI;TOKIKO KANAYAMA
分类号
H01L21/687;(IPC1-7):H01L21/31;H01L21/316;H01L21/302
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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