| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a phase mask for manufacturing a optical fiber diffraction grating having an arbitrary period and a period distribution. <P>SOLUTION: A moving stage 13 is mounted on a rail 2 on a fixing pedestal 11, a specimen 16 is fixed on the moving stage 13 through a diffraction grating 14 and a jogging mechanism 15, and a height change between the fixing pedestal 11 and the diffraction grating 14 is detected with a cantilever 17. The moving stage 13 is moved to read the period of the diffraction grating 14 to be synchronized with the cycle, an accurately patterned cycle can be formed on the specimen 16 without influencing a speed change in the moving stage 13 by irradiating the specimen 16 with an electron beam 18 while driving the jogging mechanism 15 on the basis of an amount of shift from a previously measured cyclic design value, and the cyclic distribution can be arbitrarily modified. <P>COPYRIGHT: (C)2004,JPO</p> |
