| 摘要 |
PROBLEM TO BE SOLVED: To provide a Z tilt stage capable of constituting a flattened structure. SOLUTION: A Z tilt stage comprises a base 10, a table 20 mounted on the base 10, a Z actuator 30 for driving the table so as to be positioned vertically, and two tilt actuators 40 for driving the table so as to be positioned in a tilt direction. The Z actuator and the tilt actuator include a conversion mechanism for converting movement parallel to a base surface to that perpendicular to the base surface, respectively. The Z actuator and the tilt actuator are disposed, respectively, such that directions of movements parallel to the base surface are parallel to each other. COPYRIGHT: (C)2004,JPO |
