METROLOGY HARDWARE ADAPTATION WITH UNIVERSAL LIBRARY
摘要
To generate sets of coefficients for use in optical metrology of semiconductor structures, at least three optical metrology signals for a set of parameters are obtained. The optical metrology signals are indicative of light diffracted from a semiconductor structure, and a value of at least one parameter of the set of parameters is varied to produce each signal. Functional relationships between the at least three optical metrology signals are obtained, the functional relationships including at least three coefficient values. At least three sets of coefficients from the at least three coefficient values of the functional relationships are determined.
申请公布号
WO2004013568(A2)
申请公布日期
2004.02.12
申请号
WO2003US24916
申请日期
2003.08.06
申请人
TIMBRE TECHNOLOGIES, INC.;DREGE, EMMANUEL;BAO, JUNWEI;DODDI, SRINIVAS;VUONG, VI
发明人
DREGE, EMMANUEL;BAO, JUNWEI;DODDI, SRINIVAS;VUONG, VI