| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide electric discharge laser equipment which can make a repeating frequency of the laser equipment employing a capillary discharge excitation method higher than the conventional equipment. <P>SOLUTION: The electric discharge laser equipment is provided with a cathode 21, an anode 24, a capillary 22 connecting the cathode and the anode, and has a capillary discharge mechanism connecting an introduction opening 27 for introducing discharge gas on one end of the capillary and a discharge opening 26 for discharging the discharge gas on the other end of the capillary. The electric discharge laser equipment can operate repeatedly in high frequency. In addition, the electric discharge laser equipment realizes stable discharge because the discharge gas is wholly replaced in each discharge. <P>COPYRIGHT: (C)2004,JPO |
