| 摘要 |
A manufacturing method of a master disk for fabricating an optical recording medium having unevenness includes a step of forming a photoresist layer 2 on a surface of a substrate 1, having a fine pattern corresponding to the unevenness, a first etching step of forming unevenness 3 on the surface of the substrate by using the photoresist layer as a mask and using reactive ion etching, and a second etching step of conducting oxygen ion etching on the substrate 1 after the first etching step. By thus improving the surface property and removing sharp subtrenches, the disk noise is improved.
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