发明名称 CHARGE APPLICATION BODY AND PATTERN MOLDING USING IT
摘要 PROBLEM TO BE SOLVED: To mainly provide a charge application body which enables pattern formation of a fine structure and a fine pattern molding in a semiconductor surface in a simple process. SOLUTION: The charge application body has a strain region wherein strain is introduced to a crystal structure of a crystalline semiconductor surface and charge is applied from the strain region. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004006779(A) 申请公布日期 2004.01.08
申请号 JP20030098617 申请日期 2003.04.01
申请人 UNIV WASEDA 发明人 HONMA NORIYUKI
分类号 H01L21/288;H01L21/285;(IPC1-7):H01L21/288 主分类号 H01L21/288
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