| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of analyzing with high resolution the distributed state of a material included in a thin film. SOLUTION: This method of determining the quantity of the material included in the thin film has: a process for fixing a thin film forming sample to a device, a process for cutting the sample into an ultrathin segment of 0.1 to 5μm in thickness and 1 to 10 mm<SP>2</SP>in size out of a thin film in parallel thereto, a process for extracting the ultrathin segment by a solvent not more than 20μl, and a process for determining the amount of the material in the extractant by a chromatographic device equipped with a high-sensitivity detector. The device above mentioned is equipped with a sharp cutter blade and a support allowing the forming material to be fixed thereon and movable minutely and accurately on the order ofμm in the thickness direction of a thin film, and allows an ultrathin segment to be cut out in a direction parallel to the surface of the thin film. COPYRIGHT: (C)2004,JPO
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