| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic green sheet on which a favorable pattern can be formed by a photolithographic method by using a photosensitive paste without producing residue during developing or delamination during calcining, and to provide a method for forming a pattern. <P>SOLUTION: The ceramic layer green sheet consists of a layered body of a plurality of ceramic green sheets. The particle size and/or the content per unit volume of the ceramic powder included in at least the uppermost layer is controlled to be smaller than the particle size and/or the content per unit volume of ceramic powder included in other layers, and the uppermost layer is made with excellent smoothness. The thickness of the uppermost layer is preferably 3 to 50% of the thickness of the whole sheet. Various kinds of patterns such as a conductor pattern and resistor pattern can be efficiently formed by applying a photosensitive paste on the ceramic multilayer green sheet, drying, then selectively exposing according to a specified pattern and developing. <P>COPYRIGHT: (C)2004,JPO |
