LATERAL POLYSILICON BEAM PROCESS,申请号SG20010007831-传众专利搜索

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发明名称	LATERAL POLYSILICON BEAM PROCESS
摘要
申请公布号	SG99378(A1)	申请公布日期	2003.10.27
申请号	SG20010007831	申请日期	2001.12.18
申请人	INSTITUTE OF MICROELECTRONICS	发明人	UPPILI SRIDHAR;RANGANATHAN NAGARAJAN;YU BO MIAO
分类号	B81B3/00;B81C1/00;(IPC1-7):H01L21/00	主分类号	B81B3/00
代理机构		代理人
主权项
地址

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