| 摘要 |
PURPOSE: An effusion cell equipped with crucible capable of suppressing splitting of evaporation material and increasing thickness uniformity and deposition ratio of thin film is provided. CONSTITUTION: In an effusion cell mounted in process chamber of the vacuum state, the effusion cell equipped with crucible(30) comprises a cylinder shaped first part(31) in which evaporation source is contained, and the upper part of which is opened; second part(35) comprising an upper opening part which is extended from the upper part of the first part and has a size smaller than area of the upper opening part of the first part; and inserting members(33a,33b) comprising an upper surface which is fixed in the first part and positioned at the height level of the first part so that the upper surface has an area that is superposed with the upper opening part of the first part as a whole, wherein the effusion cell equipped with crucible further comprises first filament(34a) and second filament(34b) formed of tungsten or tantalum as heating means encircling the outer surface of the integrated first part(31) and second part(35), and wherein the first part(31) comprises bottom surface(32a) and vertical side wall(32b), and the second part(35) comprises inclined side wall(36) inclined from the upper part of the vertical side wall(32b) to central shaft of the first part to provide an entrance(39) and neck part(37) extended from the upper part of the inclined side wall(36) to provide the entrance(39).
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