ELECTRODE ASSEMBLY FOR PROCESSING SEMICONDUCTOR SUBSTRATE AND PROCESSING APPARATUS HAVING THE SAME

摘要

PURPOSE: An electrode assembly for processing a semiconductor substrate and a processing apparatus having the same are provided to prevent the arc discharge generated between electrodes and connecting parts by using a bolt as the connecting part. CONSTITUTION: An electrode assembly for processing a semiconductor substrate is provided with the first electrode(202) connected with a high frequency power supply used for transforming the processing gas of the semiconductor substrate into plasma, the second electrode(204) located at the first surface of the first electrode, and the first connecting part made of the first material having the first conductivity, located for connecting the first electrode with the second electrode. Preferably, the first and second electrode are made of aluminum and the first material is one selected from a group consisting of silver, copper, gold, and aluminum. Preferably, the first connecting part includes a bolt(208) made of the first material.