发明名称 Module based flexible semiconductor test system
摘要 A semiconductor test system for testing semiconductor devices, and particularly, to a semiconductor test system having a plurality of different types of tester modules for easily establishing different semiconductor test systems. The semiconductor test system includes two or more tester modules whose performances are different from one another, a test head to accommodate the two or more tester modules having different performances, means provided on the test head for electrically connecting the tester modules and a device under test, and a host computer for controlling an overall operation of the test system by communicating with the tester modules through a tester bus. One type of the performances of the tester module is high speed high timing accuracy while other type of performance is low speed low timing accuracy. Each event tester module includes a tester board which is configured as an event based tester.
申请公布号 US6629282(B1) 申请公布日期 2003.09.30
申请号 US19990434821 申请日期 1999.11.05
申请人 ADVANTEST CORP. 发明人 SUGAMORI SHIGERU;RAJSUMAN ROCHIT
分类号 G01R31/28;G01R31/26;G01R31/3183;G01R31/319;(IPC1-7):G01R31/28;G01R31/04;G01R31/02;G06F11/00;G11C29/00 主分类号 G01R31/28
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