| 发明名称 |
REFRACTIVE PROJECTION LENS |
| 摘要 |
Disclosed is a refractive projection lens with a numerical aperture of more than 0.7, comprising a first convex form, a second convex form, and a middle that is arranged between said bodies. The first form has a maximum diameter D1 while the second form has a maximum diameter D2, and 0.8<D1/D2<1.1 applies. |
| 申请公布号 |
WO03075096(A2) |
申请公布日期 |
2003.09.12 |
| 申请号 |
WO2003EP01147 |
申请日期 |
2003.02.06 |
| 申请人 |
CARL ZEISS SMT AG;ULRICH, WILHELM;HUDYMA, RUSSELL;ROSTALSKI, HANS-JUERGEN |
发明人 |
ULRICH, WILHELM;HUDYMA, RUSSELL;ROSTALSKI, HANS-JUERGEN |
| 分类号 |
G02B13/24;G02B13/14;G02B13/18;G03F7/20;H01L21/027 |
主分类号 |
G02B13/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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