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发明名称
WAFERREINIGUNGSVORRICHTUNG MIT EINEM REINIGUNGSTANK UND EINEM EINSATZ
摘要
申请公布号
DE69811355(T2)
申请公布日期
2003.09.04
申请号
DE19986011355T
申请日期
1998.09.04
申请人
SPC ELECTRONICS CORP., CHOFU
发明人
SONODA, HARUKI;NISHIZAKI, KAZUTO;OISHI, TETSUJI;HIROKAWA, MASATOSHI;ANDO, EI'ICHI;ABE, YUSUKE;OMORI, MASASHI
分类号
H01L21/00;H01L21/304;H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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