| 摘要 |
PURPOSE: A method for fabricating a superconducting Josephson junction device is provided to form a device with a uniform characteristic by rotating a sample, and to be adapted to mass production in which a circuit is formed or a substrate of a large area is used. CONSTITUTION: The first superconducting thin film(11) and an interlayer dielectric(12) are sequentially formed on a substrate(10). A photoresist layer is formed and patterned on the interlayer dielectric. A part of the interlayer dielectric is etched by using the photoresist layer as a mask. The photoresist layer is removed. The first superconducting thin film is etched by using the interlayer dielectric as a mask. An interface layer(14) is formed on the first superconducting thin film. The second superconducting thin film(15) is formed and patterned.
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