摘要 |
PROBLEM TO BE SOLVED: To solve the technical difficulty in manufacturing a solid-state image pickup device with two horizontal transfer paths, where a pair of control electrodes of the two horizontal transfer routes occupies a pixel unit respectively, and micronization of pixel pitch is needed. SOLUTION: For vertical transfer routes 101, 102, and 103, vertical transfer parts VF of the last step connected to a horizontal transfer path 53A, are provided. It is composed so that a vertical drive control signalϕVFo is supplied to electrodes of vertical transfer parts VF of the odd number vertical transfer routes 101 and 103, and vertical drive control signalϕVFe is supplied to electrodes of a vertical transfer part VF of the even number vertical transfer path 102. By this means, the control of charge transfer parts from vertical transfer paths 101 to 103 to horizontal transfer paths 53A are separated to the odd numbered column and the even numbered column. The horizontal transfer routes 53A and 53B have a pair of electrodes for two pixels of the horizontal direction. COPYRIGHT: (C)2003,JPO
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