发明名称 Sensitivity enhancement of semiconductor magnetic sensor
摘要 A semiconductor magnetic sensor includes a semiconductor substrate, a source, a drain, a gate, and a carrier condensing means. The source and the drain are located in a surface of the substrate. One of the source and the drain includes adjoining two regions. The gate is located between the source and the drain for drawing minority carriers of the substrate to induce a channel, through which the carriers flow between the source and the drain to form a channel carrier current. The carriers flow into the two regions to form two regional carrier currents. The magnitude of a magnetic field where the sensor is placed is measured using the difference in quantity between the two regional carrier currents. The carrier condensing means locally increases carrier density in the channel carrier current in the proximity of an axis that passes between the two regions in order to increase the difference.
申请公布号 US2003160291(A1) 申请公布日期 2003.08.28
申请号 US20030374085 申请日期 2003.02.27
申请人 TOYODA INAO;ENDO NOBORU 发明人 TOYODA INAO;ENDO NOBORU
分类号 G01R33/06;H01L29/82;(IPC1-7):H01L29/82;H01L43/00 主分类号 G01R33/06
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