| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sintering method capable of effectively suppressing the warpage arising in sintering of a sintered compact target, more particularly a ceramic target, even in a region where a sintering temperature exceeds 1,400°C and capable of straightening occurred warpage and improving the yield of manufacturing and to provide a method and apparatus for straightening the sintered compact. <P>SOLUTION: The sintering method of suppressing the occurrence of the warpage comprising rotating a compact to be sintered to generate centrifugal forces and sintering the compact. <P>COPYRIGHT: (C)2003,JPO |
